Rational Design Calculation of Surface Acoustic Wave Gas Sensor


  • Mohammad Yaghoub Abdollahzadeh Jamalabadi Chabahar Maritime University


MEMS, heat removal, gas sensor , thermal design, Surface acoustic waves


The high temperature of surface acoustic wave resonator at specific frequencies is an important challenge for electronic designers. Various modifications of the cooling in ZnO based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The effect of microchannel for cooling in SAW sensor characteristics was investigated by the finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for the SAW sensor design could be estimated by the proposed approach.


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How to Cite

Mohammad Yaghoub Abdollahzadeh Jamalabadi. (2020). Rational Design Calculation of Surface Acoustic Wave Gas Sensor. To Physics Journal, 6, 62-87. Retrieved from https://purkh.com/index.php/tophy/article/view/888



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