Rational Design Calculation of Surface Acoustic Wave Gas Sensor
Keywords:MEMS, heat removal, gas sensor , thermal design, Surface acoustic waves
The high temperature of surface acoustic wave resonator at specific frequencies is an important challenge for electronic designers. Various modifications of the cooling in ZnO based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The effect of microchannel for cooling in SAW sensor characteristics was investigated by the finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for the SAW sensor design could be estimated by the proposed approach.
K. Ho, E. R. Lindgren, K. S. Rawlinson, L. K. McGrath, and J. L. Wright, “Development of a Surface Acoustic Wave Sensor for In-Situ Monitoring of Volatile Organic Compounds,” Sensors vol. 3, pp. 236–247, 2003.
S. Ahmadi, F. Hassani, C. Korman, M. Rahaman, and M. Zaghloul, “Characterization of Multi- and Single-layer Structure SAW Sensor,” Sensors 2004, Proceedings of IEEE, vol. 3, pp. 1129–1132, 2004.
Campbell C. K. (1998). Surface Acoustic Wave Devices for Mobile and Wireless Communication. San Diego: Academic Press.
Tengjiao Jiang, Chunlei Li, Qiang Han, Surface acoustic waves in 2D-phononic crystal of laminated pillars on a semi-infinite ZnO substrate, Physics Letters A, Volume 383, Issue 33, 28, 2019, 125956
R. Baumgartner, B. Reuth, W. Lanz, K. Petterson “Partial Discharge-Part IX: PD in Gas-insulated Substations- Fundamental considerations” IEEE Electr Insul. Mag., 7 (1997), pp. 5-13
G. Eranna, B.C. Joshi, D.P. Runthala, R.P. Gupta Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review Critical Reviews in Solid State and Materials Sciences, 29 (3–4) (2004), pp. 111-188
Monika Chaudhary, Amita Gupta Microcantilever-based Sensors Defence Science Journal, 59 (6) (2009), pp. 634-641
S. Iijima Helical microtubules of graphitic carbon Nature, 354 (1991), p. 56
R. Quintero, F. Simonetti, P. Howard, J. Friecll, A. Sellinger Noncontact laser ultrasonic inspection of ceramic matrix composites (CMCs) NDT E Int., 88 (2017), pp. 8-16
N. Hosoya, R. Umino, A. Kanda, I. Kajiwara, A. Yoshinaga Lamb wave generation using nanosecond laser ablation to detect damage J. Vib. Control, 24 (24) (2017), pp. 5842-5853
M.I. Chen, S.P. Tesng, P.Y. Lo, C.H. Yang Characterization of wedge waves propagating along wedge tips with defects Ultrasonics, 82 (2018), pp. 289-297
Y. Wang, D. Chen, C. Wu, J. Xie Effect of droplet boundary behaviors on SAW attenuation for potential microfluidic applications Jpn. J. Appl. Phys., 58 (3) (2019), p. 037001
X.Y. Du, Y.Q. Fu, J.K. Luo, A.J. Flewitt, W.I. Milne Microfluidic pumps employing surface acoustic waves generated in ZnO thin films J. Appl. Phys., 105 (2) (2009), p. 024508
Y.Q. Fu, L. Garcia-Gancedo, H.F. Pang, S. Porro, Y.W. Gu, J.K. Luo, X.T. Zu, F. Placido, J.I.B. Wilson, A.J. Flewitt, W.I. Milne Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices Biomicrofluidics, 6 (2) (2012), p. 024105
Y. Wang, Z. Xu, Y. Wang, J. Xie A study on AIN film-based SAW attenuation in liquids and their potential as liquid ethanol sensors Sensors, 17 (8) (2017), p. 1813
M. Abdelgawad, S.L. Freire, H. Yang, A.R. Wheeler All-terrain droplet actuation Lab Chip, 8 (5) (2008), pp. 672-677.
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Copyright (c) 2020 Mohammad Yaghoub Abdollahzadeh Jamalabadi
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